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The Helios C200 attributes a complicated temperature measurement and Regulate technique combined with an active compensation algorithm for different wafer emissivities.
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Protection in the “Ring Of Problem” (ROC). The ROC is a really slim line Situated on The interior aspect from the RTP for which a small probability of contamination exchange stays. This is due to engineering tolerances, non-perfect mother nature of your seals, and likely micro-use of utilization.
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Our Helios loved ones RTP devices offer you exceptional double-aspect heating RTP engineering. It could accomplish the highest wafer temperature ramp rate when balancing wafer frontside and bottom temperatures, remove sample-loading result, provide exceptional wafer worry management abilities, fulfill technological demands for RTP procedures with distinctive substrate thickness and device buildings, and attain the very best program productivity at the same time.
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By selecting Balanset, organizations can reach important advancements within their balancing processes, reaping long-time period Added benefits Subsequently. Embrace the future of vibration management and explore how Balanset can redefine your approach to maintaining machinery.